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Companies / Information Technology / Axcelis Technologies, Inc.
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Axcelis Technologies, Inc.

Information TechnologyIndustrial Machinery
Ticker ACLSBEVERLY, MAFiscal year ends DecemberBook value per share $34.29Diluted shares 31.1M

Axcelis Technologies, Inc. (Nasdaq: ACLS) designs, manufactures and services ion implantation and other processing equipment used by semiconductor chip manufacturers worldwide. Its systems introduce precisely controlled dopants into silicon and silicon carbide wafers during chip fabrication; products include the… From the company’s description.

In fiscal 2025, Axcelis Technologies, Inc. reported revenue of $839.05M, down 17.6% from fiscal 2024, and net income of $120.24M. Its operating margin was 14.2%, and operations generated $118.31M in cash. Over the twelve months to Jun 30, 2026, revenue was $866.07M.

Fiscal year 2025 · ends 12-31Changes are against fiscal 2024The amber dot is the latest twelve months, to 2026-06-30
Sales & profitability
$839.05MFY2025
−17.6% year over year
Last 12 mo $866.07M
14.22%FY2025
−6.5 percentage points
Last 12 mo 10.33%
$120.24MFY2025
−40.2% year over year
Last 12 mo $92.79M
11.62%FY2025
−8.2 percentage points
Last 12 mo 8.71%
Cash & financing
$118.31MFY2025
−16.0% year over year
Last 12 mo $75.30M
$107.01MFY2025
−16.8% year over year
Last 12 mo $65.55M
0.04FY2025
Was 0.04× a year earlier
Last 12 mo 0.04
31.7MFY2025
−3.2% year over year
Last 12 mo 31.1M

Margins and return on equity change in ; everything else in percent. Fewer shares and less debt are shown plainly, not as bad news — it depends what you make of buybacks. Dotted labels explain each measure. is shown separately from the annual figures.

What Axcelis Technologies, Inc. does

In the company’s own words

Axcelis Technologies, Inc. (Nasdaq: ACLS) designs, manufactures and services ion implantation and other processing equipment used by semiconductor chip manufacturers worldwide. Its systems introduce precisely controlled dopants into silicon and silicon carbide wafers during chip fabrication; products include the Purion line of high-current, high-energy and medium-current implanters, the Purion Power Series for power devices, and Ovation batch implanters. Axcelis also provides used equipment, spare parts, upgrades, maintenance, training and other lifecycle support through its Customer Solutions & Innovation business. The company reports a single business segment; ion implantation accounted for 98.2% of 2025 revenue, with the remainder from aftermarket sales for legacy processing systems. Its systems serve chipmakers including integrated electronics manufacturers and foundries, while aftermarket services support its installed base of approximately 3,400 tools in 27 countries. Revenue was $839.0 million in fiscal 2025, and the company had 1,465 employees at year-end. Axcelis’ business began in 1978, and its current corporate entity was incorporated in 1995. Its website is www.axcelis.com.

Company details
Sector
Information Technology
Industry (SIC)
Industrial Machinery
Headquarters
BEVERLY, MA
Fiscal year end
December
CIK
1113232
SIC
3559

Financial performance, year by year

Fiscal 2013–2025 · USD
$-131.92M$212.41M$556.73M$901.05M$1.25B2013201420152016201720182019202020212022202320242025Last 12 moLast 12 monthsLast 12 months

The full income statement, balance sheet and cash flow for each of these years — every figure traceable to its filing — is on the Financials tab with a free account.

Ownership

Who owns Axcelis Technologies, Inc. — and what changed

Funds as of 2026Q2 · superinvestors as of 2026-06-30

355
funds hold it
0 of 35
superinvestors hold it
$2.95B
held by funds, at market
56.6%
of shares held by funds

Largest fund holders · Axcelis Technologies, Inc.’s weight in each

iShares Core S&P Small-Cap ETF
IJR · iShares Trust
0.32%of fund net assets
VANGUARD TOTAL STOCK MARKET INDEX FUND
VTI · VANGUARD INDEX FUNDS
0.01%of fund net assets
iShares Russell 2000 ETF
IWM · iShares Trust
0.18%of fund net assets
VANGUARD SMALL-CAP INDEX FUND
VB · VANGUARD INDEX FUNDS
0.07%of fund net assets
0.07%of fund net assets

Fund ownership is a floor, not a census — pensions, insurers and people holding shares directly are not visible here.

Fund ownership counts N-PORT filers only, so it is a floor rather than a census — pensions, insurers and direct holders are not visible here, and the remainder is not “held by individuals”.

Every fund and institutional holder, quarter by quarter, is on the Ownership tab with a free account.

Connected research

Put this business in context.

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