Axcelis Technologies, Inc.
Axcelis Technologies, Inc. (ACLS: NASDAQ) designs, manufactures, and services ion implantation and other processing equipment used in semiconductor chip fabrication. The company maintains its website at www.axcelis.com. From the company’s description.
Margins and return on equity change in ; everything else in percent. Fewer shares and less debt are shown plainly, not as bad news — it depends what you make of buybacks. Dotted labels explain each measure. is shown separately from the annual figures.
What Axcelis Technologies, Inc. does
In the company’s own words
Axcelis Technologies, Inc. (ACLS: NASDAQ) designs, manufactures, and services ion implantation and other processing equipment used in semiconductor chip fabrication. The company maintains its website at www.axcelis.com.
The company's core business centers on ion implantation systems, which represent 98.2% of revenue. Axcelis offers a comprehensive product portfolio including the Purion family of high current, high energy, and medium current implanters, as well as the Ovation family of batch implanters. The Purion Power Series specifically targets power device applications critical to electric vehicles and industrial applications, utilizing silicon carbide wafers. Beyond equipment sales, Axcelis generates significant revenue through its Customer Solutions & Innovation aftermarket business, which accounted for 31.9% of total revenue in 2025. This division provides used tools, spare parts, equipment upgrades, maintenance services, customer training, and innovative offerings such as the Digital Tool Box featuring online training and remote diagnostics.
Axcelis operates manufacturing facilities in Beverly, Massachusetts, housing a 417,000 square-foot ISO-certified plant, an Axcelis Asia Operations Center in South Korea spanning 38,000 square feet, and a 101,800 square-foot logistics center in Beverly. The company maintains a global presence across 27 countries with 1,465 employees as of December 31, 2025, distributed across North America, Asia, and Europe. Sales and marketing operations span the United States, Taiwan, South Korea, China, Singapore, Japan, Germany, and Italy.
International revenue represented 83.7% of total revenue in 2025, with Asia accounting for 76.0% of system revenue. The company serves leading semiconductor manufacturers worldwide, with its top ten customers representing 55.2% of net sales in 2025. Axcelis competes primarily against Applied Materials in the ion implantation market, with additional competition from Japanese, Taiwanese, and Chinese manufacturers.
The company maintains an extensive intellectual property portfolio comprising 169 active U.S. patents and 356 active patents in other countries, along with 167 patent applications pending worldwide. Founded in 1978 with its current corporate entity incorporated in Delaware in 1995, Axcelis has established itself as a technology leader in ion implantation systems serving the semiconductor capital equipment industry.
Company details
- Sector
- Information Technology
- Industry (SIC)
- Industrial Machinery
- Headquarters
- BEVERLY, MA
- Fiscal year end
- December
- CIK
- 1113232
- SIC
- 3559
Financial performance, year by year
Fiscal 2013–2025 · USDThe full income statement, balance sheet and cash flow for each of these years — every figure traceable to its filing — is on the Financials tab with a free account.
Who owns Axcelis Technologies, Inc. — and what changed
Funds as of 2026Q2 · superinvestors as of 2026-06-30
Largest fund holders · Axcelis Technologies, Inc.’s weight in each
Fund ownership is a floor, not a census — pensions, insurers and people holding shares directly are not visible here.
Fund ownership counts N-PORT filers only, so it is a floor rather than a census — pensions, insurers and direct holders are not visible here, and the remainder is not “held by individuals”.
Every fund and institutional holder, quarter by quarter, is on the Ownership tab with a free account.
Recent filings
All filings →Each filing opens into its own statements and disclosures here.
Put this business in context.
Compare this company with peers, find it in your funds and follow its financial history with your connected AI:
- “How do Axcelis Technologies, Inc. and its peers compare on margins and cash generation over ten years?”
- “Where did five years of Axcelis Technologies, Inc.'s earnings go — cash, debt, buybacks, reinvestment?”
- “What changed in Axcelis Technologies, Inc.'s last four quarterly filings that the numbers alone won't show?”